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Customized Chemical Vapor Deposition Furnace , Gas Vacuum Induction Furnace

Customized Chemical Vapor Deposition Furnace , Gas Vacuum Induction Furnace
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Name: Chemical Vapor Deposition Furnace
Feature: Easy Operation
Dimension(L*W*H): 35L
Cooling Method: Internal Circulation Cooling
Max Operating Temp: 1500
Application: Silicon Carbide, Ceramics
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metal melting furnace


steel melting furnace

Basic Infomation
Place of Origin: China
Brand Name: Xirui
Certification: CE
Model Number: Chemical Vapor Deposition Furnace
Payment & Shipping Terms
Packaging Details: Standard Packing
Delivery Time: Shipped in 25 days after payment
Payment Terms: L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability: 800 pcs per month
Product Description

Customized Chemical Vapor Deposition Furnace , Gas Vacuum Induction Furnace




It can be used for chemical vapor deposition of composite materials with carbon gas (such as C3H8, etc.) as carbon source, such as CVD and CVI treatment of C/C composite materials and SiC composite materials.




Using advanced control technology, it can precisely control the flow and pressure of the gas, the deposition gas flow in the furnace is stable, and the pressure fluctuation range is small;

The special structure deposition chamber has good sealing effect and strong anti-pollution ability;

The multi-channel deposition gas path is adopted, the flow field is uniform, the deposition dead angle is not formed, and the deposition effect is good;

Highly corrosive tail gas, flammable and explosive gas, solid dust and low melting point viscous products produced by deposition can be effectively treated;

The latest design anti-corrosion vacuum unit has a long working time and low maintenance rate.

Main configuration of deposition furnace

Furnace door: screw lift / / hydraulic lift /; manual lock / automatic lock ring lock

Furnace shell: full carbon steel / inner layer stainless steel / all stainless steel

Furnace: soft carbon felt / soft graphite felt / hard composite felt

Heater: isostatic graphite / molded three high graphite / fine graphite

Process gas system: volume / mass flow meter; manual valve / automatic valve; imported / domestic

Vacuum pump and vacuum gauge---import/domestic

Man-machine interface: touch screen / industrial computer

Electrical components: Chint / Schneider / Siemens


Volume (L) 35 226 602 1177 1899
Maximum temperature (°C) 1500 1500 1500 1500 1500
Work area size D × H (mm) Φ300×500 Φ600×800 Φ800×1200 Φ1000×1500 Φ1100×2000
Temperature control method Japan Island Electric Temperature Controller
heating method Resistance heating
Vacuum system Anti-fouling pump or spool pump + Roots pump
Sintering atmosphere Hydrocarbon gas, etc.
Rated power supply voltage (V) 380
Rated heating voltage (V) According to the design, configure the furnace transformer
Vacuum limit (Pa) 6X10ˉ2 (vacuum cold state)
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Get in touch with us
Contact Person : furnacess
Tel : + 86 17733330123
Fax : 86-10-34242423-33
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