Customized Chemical Vapor Deposition Furnace , Gas Vacuum Induction Furnace
Application:
It can be used for chemical vapor deposition of composite materials with carbon gas (such as C3H8, etc.) as carbon source, such as CVD and CVI treatment of C/C composite materials and SiC composite materials.
Features:
Using advanced control technology, it can precisely control the flow and pressure of the gas, the deposition gas flow in the furnace is stable, and the pressure fluctuation range is small;
The special structure deposition chamber has good sealing effect and strong anti-pollution ability;
The multi-channel deposition gas path is adopted, the flow field is uniform, the deposition dead angle is not formed, and the deposition effect is good;
Highly corrosive tail gas, flammable and explosive gas, solid dust and low melting point viscous products produced by deposition can be effectively treated;
The latest design anti-corrosion vacuum unit has a long working time and low maintenance rate.
Main configuration of deposition furnace
Furnace door: screw lift / / hydraulic lift /; manual lock / automatic lock ring lock
Furnace shell: full carbon steel / inner layer stainless steel / all stainless steel
Furnace: soft carbon felt / soft graphite felt / hard composite felt
Heater: isostatic graphite / molded three high graphite / fine graphite
Process gas system: volume / mass flow meter; manual valve / automatic valve; imported / domestic
Vacuum pump and vacuum gauge---import/domestic
Man-machine interface: touch screen / industrial computer
Electrical components: Chint / Schneider / Siemens
| Volume (L) | 35 | 226 | 602 | 1177 | 1899 |
| Maximum temperature (°C) | 1500 | 1500 | 1500 | 1500 | 1500 |
| Work area size D × H (mm) | Φ300×500 | Φ600×800 | Φ800×1200 | Φ1000×1500 | Φ1100×2000 |
| Temperature control method | Japan Island Electric Temperature Controller | ||||
| heating method | Resistance heating | ||||
| Vacuum system | Anti-fouling pump or spool pump + Roots pump | ||||
| Sintering atmosphere | Hydrocarbon gas, etc. | ||||
| Rated power supply voltage (V) | 380 | ||||
| Rated heating voltage (V) | According to the design, configure the furnace transformer | ||||
| Vacuum limit (Pa) | 6X10ˉ2 (vacuum cold state) | ||||
